Mechanism of diamond film growth by hot-filament CVD: Carbon-13 studies

書誌事項

公開日
1990-11
権利情報
  • https://www.cambridge.org/core/terms
DOI
  • 10.1557/jmr.1990.2405
公開者
Springer Science and Business Media LLC

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説明

<jats:p>Mixed carbon-12/carbon-13 diamond films were synthesized by hot-filament chemical vapor deposition, using mixtures of <jats:sup>13</jats:sup>CH<jats:sub>4</jats:sub> and <jats:sup>12</jats:sup>CH<jats:sub>4</jats:sub> or <jats:sup>12</jats:sup>C<jats:sub>2</jats:sub>H<jats:sub>2</jats:sub> in H<jats:sub>2</jats:sub>. The first-order Raman peak at 1332 cm<jats:sup>−1</jats:sup> for <jats:sup>12</jats:sup>C-diamond was found to shift by 50 cm<jats:sup>−1</jats:sup> to 1282 cm<jats:sup>−1</jats:sup> for pure <jats:sup>13</jats:sup>C-diamond. For mixed-isotope films, the Raman peak frequency shifts linearly between these values as a function of the <jats:sup>13</jats:sup>C mole fraction. The mechanism of diamond film growth by hot-filament CVD has been investigated by growth from mixtures of <jats:sup>13</jats:sup>CH<jats:sub>4</jats:sub> and <jats:sup>12</jats:sup>C<jats:sub>2</jats:sub>H<jats:sub>2</jats:sub>, using the shifted Raman frequency to determine the relative incorporation rates of <jats:sup>13</jats:sup>C and <jats:sup>12</jats:sup>C into the film. The <jats:sup>13</jats:sup>C mole fraction in the film agrees closely with the <jats:sup>13</jats:sup>C mole fraction inferred for the methyl radical but differs substantially from that of acetylene, indicating that the methyl radical is the dominant growth precursor under the conditions studied.</jats:p>

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