Effect of textured LaNiO3 electrode on the fatigue improvement of Pb(Zr0.53Ti0.47)O3 thin films

DOI PDF 被引用文献9件
  • Ming-Sen Chen
    Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30043, Taiwan, Republic of China
  • Tai-Bor Wu
    Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30043, Taiwan, Republic of China
  • Jenn-Ming Wu
    Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30043, Taiwan, Republic of China

書誌事項

公開日
1996-03-04
DOI
  • 10.1063/1.116103
公開者
AIP Publishing

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<jats:p>By changing the electrode combination of Pt and LaNiO3 (LNO), four capacitor types of Pt/PZT/Pt/Si, Pt/LNO/PZT/Pt/Si, Pt/LNO/PZT/LNO/Pt/Si, and Pt/PZT/LNO/Pt/Si, were prepared to investigate the fatigue and hysteresis characteristics of the sol-gel-derived Pb(Zr0.53Ti0.47)O3 (PZT) ferroelectric thin films. Among them, the (100)- and (001)-oriented PZT films were grown on the (100)-textured LNO electrode, but randomly oriented films were obtained on the Pt electrode. It was found that the use of LNO bottom electrode would improve the fatigue property quite significantly, but only the capacitor with LNO as both top and bottom electrodes is shown to be fatigue-free up to 1011 cycles, and the shapes of the hysteresis loop almost unchanged after the fatigue test.</jats:p>

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