Strain and wafer curvature of 3C‐SiC films on silicon: influence of the growth conditions
書誌事項
- 公開日
- 2007-03-28
- 権利情報
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- http://onlinelibrary.wiley.com/termsAndConditions#vor
- DOI
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- 10.1002/pssa.200674130
- 公開者
- Wiley
この論文をさがす
説明
<jats:title>Abstract</jats:title><jats:p>We study the influence of the growth conditions on the residual strain and related optical and structural properties in the case of 3C‐SiC films grown on (001) silicon substrates. We show that two possible mechanisms compete to manage the final sample bow: one is by controlling the composition of the gaseous phase (C/Si ratio) the other one by adjusting the growth temperature and duration (creep effect). In both cases, we compare the low temperature photoluminescence spectra of samples grown under tensile or compressive final stress. We show that better results can be obtained when using the creep effect. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)</jats:p>
収録刊行物
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- physica status solidi (a)
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physica status solidi (a) 204 (4), 981-986, 2007-03-28
Wiley