Interdiffusion of In and Ga in InGaN/GaN multiple quantum wells

  • Chang-Cheng Chuo
    Department of Electrical Engineering, National Central University, Chung-Li, Taiwan 32054, Republic of China
  • Chia-Ming Lee
    Department of Electrical Engineering, National Central University, Chung-Li, Taiwan 32054, Republic of China
  • Jen-Inn Chyi
    Department of Electrical Engineering, National Central University, Chung-Li, Taiwan 32054, Republic of China

書誌事項

公開日
2001-01-15
DOI
  • 10.1063/1.1339991
公開者
AIP Publishing

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説明

<jats:p>Thermal stability of InxGa1-xN/GaN multiple quantum wells with InN mole fraction of ∼0.23 and ∼0.30 was investigated by postgrowth thermal annealing. Low temperature photoluminescence spectroscopy was employed to determine the temperature dependence of the interdiffusion coefficient of In and Ga in InGaN/GaN quantum wells. The interdiffusion process is characterized by a single activation energy of about 3.4±0.5 eV and governed by vacancy-controlled second-nearest-neighbor hopping. Due to composition inhomogeneity, lower diffusivity is observed at the early stage of thermal annealing.</jats:p>

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