Enriching Si quantum dots in a Si-rich SiN<sub>x</sub>matrix for strong χ<sup>(3)</sup>optical nonlinearity

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Abstract

<p>The optical nonlinearity of dense Si quantum dots doped SiNxmatrix enhanced by three orders of magnitude larger than that of stoichiometric Si3N4is demonstrated<italic>via</italic>detuning the excessive Si content from stoichiometric composition.</p>

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