Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters

詳細情報 詳細情報について

• CRID

  1363107368682500480

• DOI

  10.1007/s00542-012-1550-9

• ISSN

  14321858

  09467076

• Web Site

  http://link.springer.com/content/pdf/10.1007/s00542-012-1550-9.pdf

  http://link.springer.com/article/10.1007/s00542-012-1550-9/fulltext.html

  http://link.springer.com/content/pdf/10.1007/s00542-012-1550-9

• データソース種別

  • Crossref