Azimuthally symmetric pseudosurface and helicon wave propagation in an inductively coupled plasma at low magnetic field

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  • T. Lho
    Department of Engineering Physics, University of Wisconsin, 1500 Engineering Drive, Madison, Wisconsin 53705
  • N. Hershkowitz
    Department of Engineering Physics, University of Wisconsin, 1500 Engineering Drive, Madison, Wisconsin 53705
  • J. Miller
    Department of Engineering Physics, University of Wisconsin, 1500 Engineering Drive, Madison, Wisconsin 53705
  • W. Steer
    Department of Engineering Physics, University of Wisconsin, 1500 Engineering Drive, Madison, Wisconsin 53705
  • G. H. Kim
    Department of Engineering Physics, University of Wisconsin, 1500 Engineering Drive, Madison, Wisconsin 53705

抄録

<jats:p>The mode transition from a capacitively coupled mode (E mode) to an inductively coupled mode (H mode) was observed in an inductive Ar plasma source by applying an axially uniform low B field. The applied fundamental rf was 13.56 MHz and many harmonic components were observed. A beat and standing wave patterns of azimuthally symmetric (m=0 mode) first and second harmonic pseudosurfaces and helicon waves were measured at various densities (n∼9.0×1010–2.2×1011 cm−3) and B fields (12–28 G). Wave propagation mode changes, from pseudosurface to helicon waves and from helicon to pseudosurface waves, were observed at critical conditions, ωc/ω&gt;3.0 and n∼2.2×1011 cm−3.</jats:p>

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