Fabrication and Performance Test of Fresnel Zone Plate with 35 nm Outermost Zone Width in Hard X-Ray Region
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- Yoshio Suzuki
- Japan Synchrotron Radiation Research Insitute (JASRI)/SPring-8, Sayo Hyogo 679-5198, Japan
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- Akihisa Takeuchi
- Japan Synchrotron Radiation Research Insitute (JASRI)/SPring-8, Sayo Hyogo 679-5198, Japan
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- Hisataka Takenaka
- NTT-AT Nanofabrication Corporation, Atsugi, Kanagawa 243-0018, Japan
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- Ikuo Okada
- NTT-AT Nanofabrication Corporation, Atsugi, Kanagawa 243-0018, Japan
抄録
<jats:p>A Fresnel zone plate (FZP) with 35 nm outermost zone width has been fabricated and tested in the hard X-ray region. The FZP was made by electron beam lithography and reactive ion etching technique. The performance test of the FZP was carried out by measuring the focused beam profile for coherent hard X-ray beam at the beamline 20XU of SPring-8. The full width at half maximum of the focused beam profile measured by knife-edge scan method is <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML"><mml:mrow><mml:mn>34.9</mml:mn><mml:mo>±</mml:mo><mml:mn>2.7</mml:mn></mml:mrow></mml:math> nm, that agrees well with the theoretical value of diffraction-limited resolution. Applications to scanning microscopy were also carried out.</jats:p>
収録刊行物
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- X-Ray Optics and Instrumentation
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X-Ray Optics and Instrumentation 2010 1-6, 2010-07-13
Hindawi Limited