Characterization of SiC Epitaxial Wafers by Photoluminescence under Deep UV Excitation
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- Michio Tajima
- Japan Aerospace Exploration Agency
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- M. Tanaka
- Institute of Space and Astronautical Science
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- Norihiro Hoshino
- Japan Aerospace Exploration Agency
収録刊行物
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- Materials Science Forum
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Materials Science Forum 389-393 597-600, 2002-04-01
Trans Tech Publications, Ltd.