Electric and pyroelectric properties of AlN thin films deposited by reactive magnetron sputtering on Si substrate
書誌事項
- 公開日
- 2015-10
- 権利情報
-
- https://www.elsevier.com/tdm/userlicense/1.0/
- DOI
-
- 10.1016/j.apsusc.2015.07.059
- 公開者
- Elsevier BV
この論文をさがす
収録刊行物
-
- Applied Surface Science
-
Applied Surface Science 353 1195-1202, 2015-10
Elsevier BV