Tip characterizer for atomic force microscopy

DOI PDF 被引用文献14件
  • Hiroshi Itoh
    National Institute of Advanced Industrial Science and Technology , AIST Tsukuba Central 2, 1-1 Umezono 1-Chome, Tsukuba-shi, Ibaraki-ken 305-8568, Japan
  • Toshiyuki Fujimoto
    National Institute of Advanced Industrial Science and Technology , AIST Tsukuba Central 2, 1-1 Umezono 1-Chome, Tsukuba-shi, Ibaraki-ken 305-8568, Japan
  • Shingo Ichimura
    National Institute of Advanced Industrial Science and Technology , AIST Tsukuba Central 2, 1-1 Umezono 1-Chome, Tsukuba-shi, Ibaraki-ken 305-8568, Japan

抄録

<jats:p>A tip characterizer for atomic force microscopy (AFM) was developed based on the fabrication of multilayer thin films. Comb-shaped line and space (LS) and wedge-shaped knife-edge structures were fabricated on a GaAs substrate. GaAs∕InGaP superlattices were used to control the width of the structures precisely, and selective chemical etching was used to form sharp edges on the nanostructures. The minimum size of the LS structure was designed to be 10nm, and the radius of the knife edge was less than 5nm. These nanostructures were used as a well-defined tip characterizer to measure the shape of a tip on a cantilever from line profiles of AFM images.</jats:p>

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