On the band structure lineup at interfaces of SiO2, Si3N4, and high-κ dielectrics

  • Winfried Mönch
    Department of Physics, Universität Duisburg-Essen , 47048 Duisburg, Germany

書誌事項

公開日
2005-03-14
DOI
  • 10.1063/1.1866641
公開者
AIP Publishing

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説明

<jats:p>The interface-induced gap states (IFIGS) are the fundamental mechanism which determines the band structure lineup at semiconductor interfaces. The valence-band offsets of semiconductor heterostructures and the barrier heights of Schottky contacts are given by the branch-point energies of the IFIGS of the semiconductors and respective electric-dipole terms. The branch-point energies of SiO2, Si3N4, and of the high-κ dielectrics Al2O3, HfO2, and ZrO2 are determined as 3.99±0.10, 1.93±0.14, 3.23±0.42, 2.62±0.18, and ≈3.2eV, respectively, from experimental valence-band offsets of heterostructures of these insulators.</jats:p>

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