Wide-bandgap high-mobility ZnO thin-film transistors produced at room temperature

  • Elvira M. C. Fortunato
    Department of Materials Science/CENIMAT , Faculty of Sciences and Technology, New University of Lisbon and CEMOP-UNINOVA, Campus da Caparica, 2829-516 Caparica, Portugal
  • Pedro M. C. Barquinha
    Department of Materials Science/CENIMAT , Faculty of Sciences and Technology, New University of Lisbon and CEMOP-UNINOVA, Campus da Caparica, 2829-516 Caparica, Portugal
  • Ana C. M. B. G. Pimentel
    Department of Materials Science/CENIMAT , Faculty of Sciences and Technology, New University of Lisbon and CEMOP-UNINOVA, Campus da Caparica, 2829-516 Caparica, Portugal
  • Alexandra M. F. Gonçalves
    Department of Materials Science/CENIMAT , Faculty of Sciences and Technology, New University of Lisbon and CEMOP-UNINOVA, Campus da Caparica, 2829-516 Caparica, Portugal
  • António J. S. Marques
    Department of Materials Science/CENIMAT , Faculty of Sciences and Technology, New University of Lisbon and CEMOP-UNINOVA, Campus da Caparica, 2829-516 Caparica, Portugal
  • Rodrigo F. P. Martins
    Department of Materials Science/CENIMAT , Faculty of Sciences and Technology, New University of Lisbon and CEMOP-UNINOVA, Campus da Caparica, 2829-516 Caparica, Portugal
  • Luis M.N. Pereira
    Department of Materials Science/CENIMAT , Faculty of Sciences and Technology, New University of Lisbon and CEMOP-UNINOVA, Campus da Caparica, 2829-516 Caparica, Portugal

書誌事項

公開日
2004-09-27
DOI
  • 10.1063/1.1790587
公開者
AIP Publishing

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説明

<jats:p>We report high-performance ZnO thin-film transistor (ZnO-TFT) fabricated by rf magnetron sputtering at room temperature with a bottom gate configuration. The ZnO-TFT operates in the enhancement mode with a threshold voltage of 19V, a saturation mobility of 27cm2∕Vs, a gate voltage swing of 1.39V∕decade and an on/off ratio of 3×105. The ZnO-TFT presents an average optical transmission (including the glass substrate) of 80% in the visible part of the spectrum. The combination of transparency, high mobility, and room-temperature processing makes the ZnO-TFT a very promising low-cost optoelectronic device for the next generation of invisible and flexible electronics.</jats:p>

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