Deposition of a TMDSO-Based Film by a Non-Equilibrium Atmospheric Pressure DC Plasma Jet
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- Xiaolong Deng
- Department of Applied Physics; Ghent University; Sint-Pietersnieuwstraat 41 9000 Ghent, Belgium
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- Anton Yu Nikiforov
- Department of Applied Physics; Ghent University; Sint-Pietersnieuwstraat 41 9000 Ghent, Belgium
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- Nathalie De Geyter
- Department of Applied Physics; Ghent University; Sint-Pietersnieuwstraat 41 9000 Ghent, Belgium
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- Rino Morent
- Department of Applied Physics; Ghent University; Sint-Pietersnieuwstraat 41 9000 Ghent, Belgium
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- Christophe Leys
- Department of Applied Physics; Ghent University; Sint-Pietersnieuwstraat 41 9000 Ghent, Belgium
書誌事項
- タイトル別名
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- Deposition of a TMDSO-Based Film…
- 公開日
- 2013-04-08
- 権利情報
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- http://doi.wiley.com/10.1002/tdm_license_1.1
- http://onlinelibrary.wiley.com/termsAndConditions#vor
- DOI
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- 10.1002/ppap.201200166
- 公開者
- Wiley
この論文をさがす
収録刊行物
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- Plasma Processes and Polymers
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Plasma Processes and Polymers 10 (7), 641-648, 2013-04-08
Wiley