Effects of kinematic variables on nonuniformity in chemical mechanical planarization
書誌事項
- 公開日
- 2000-09
- 権利情報
-
- https://www.elsevier.com/tdm/userlicense/1.0/
- DOI
-
- 10.1016/s0890-6955(00)00013-4
- 公開者
- Elsevier BV
この論文をさがす
収録刊行物
-
- International Journal of Machine Tools and Manufacture
-
International Journal of Machine Tools and Manufacture 40 (11), 1651-1669, 2000-09
Elsevier BV