High‐resolution, high‐throughput imaging with a multibeam scanning electron microscope
-
- A.L. EBERLE
- Carl Zeiss Microscopy GmbH Oberkochen Germany
-
- S. MIKULA
- Max‐Planck‐Institute for Medical Research Heidelberg Germany
-
- R. SCHALEK
- Department of Molecular and Cell Biology Harvard University Cambridge Massachusetts U.S.A.
-
- J. LICHTMAN
- Department of Molecular and Cell Biology Harvard University Cambridge Massachusetts U.S.A.
-
- M.L. KNOTHE TATE
- Graduate School of Biomedical Engineering University of New South Wales Sydney Australia
-
- D. ZEIDLER
- Carl Zeiss Microscopy GmbH Oberkochen Germany
説明
<jats:title>Summary</jats:title><jats:p>Electron–electron interactions and detector bandwidth limit the maximal imaging speed of single‐beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers.</jats:p>
収録刊行物
-
- Journal of Microscopy
-
Journal of Microscopy 259 (2), 114-120, 2015-01-27
Wiley
