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A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity
Bibliographic Information
- Published
- 1982-01
- Rights Information
-
- https://ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html
- https://doi.org/10.15223/policy-029
- https://doi.org/10.15223/policy-037
- DOI
-
- 10.1109/t-ed.1982.20656
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
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Journal
-
- IEEE Transactions on Electron Devices
-
IEEE Transactions on Electron Devices 29 (1), 42-48, 1982-01
Institute of Electrical and Electronics Engineers (IEEE)
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Details 詳細情報について
-
- CRID
- 1363388844498533760
-
- ISSN
- 15579646
- 00189383
- http://id.crossref.org/issn/00189383
-
- Data Source
-
- Crossref