Investigation of the solvent‐evaporation effect on spin coating of thin films
説明
<jats:title>Abstract</jats:title><jats:p>A simple empirical relationship exists between the thickness and the solvent‐evaporation rate of spin‐coated thin films. The thickness of a film formed from an organic solvent solution can be approximated by the relationship<jats:styled-content>\documentclass{article}\pagestyle{empty}\begin{document}$ D = K_0 \mu ^{0.36} \omega ^{ - 0.50} (E\lambda /C_p)^{0.60} $\end{document}<jats:inline-graphic xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="graphic/tex2gif-ueqn-1.gif" xlink:title="equation image" /></jats:styled-content>, where μ is the viscosity of the coating solution, ω is the rotation speed, <jats:italic>E</jats:italic> is the solvent‐evaporation rate, λ is the latent heat of evaporation, <jats:italic>C</jats:italic><jats:sub><jats:italic>p</jats:italic></jats:sub> is the heat capacity of the solvent, and <jats:italic>K</jats:italic><jats:sub>0</jats:sub> is a constant for volatile organic solvents. A similar relationship for aqueous polymer solutions is<jats:styled-content>\documentclass{article}\pagestyle{empty}\begin{document}$ D = K_0 \mu ^{0.36} \omega ^{ - 0.50} (1.0 - RH)^{0.60} $\end{document}<jats:inline-graphic xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="graphic/tex2gif-ueqn-2.gif" xlink:title="equation image" /></jats:styled-content>, where <jats:italic>RH</jats:italic> is the relative humidity of air around the spin coater and <jats:italic>K</jats:italic><jats:sub><jats:italic>a</jats:italic></jats:sub> is a constant for aqueous solutions. These relationships are helpful in understanding the mechanism of thin‐film formation in spin coating.</jats:p>
収録刊行物
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- Polymer Engineering & Science
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Polymer Engineering & Science 23 (7), 399-403, 1983-05
Wiley
