Mass Spectra and Ionization Temperatures in an Argon-Nitrogen Inductively Coupled Plasma
-
- Robert S. Houk
- Ames Laboratory-U.S. Department of Energy and Department of Chemistry, Iowa State University, Ames, Iowa 50011
-
- Akbar Montaser
- Ames Laboratory-U.S. Department of Energy and Department of Chemistry, Iowa State University, Ames, Iowa 50011
-
- Velmer A. Fassel
- Ames Laboratory-U.S. Department of Energy and Department of Chemistry, Iowa State University, Ames, Iowa 50011
この論文をさがす
説明
<jats:p> Positive ions were extracted from the axial channel of an inductively coupled plasma (ICP) in which the outer gas flow was Ar, N<jats:sub>2</jats:sub>, or a mixture of Ar and N<jats:sub>2</jats:sub>. Addition of N<jats:sub>2</jats:sub> to the outer gas decreases the electron number density ( n<jats:sub>e</jats:sub>) in the axial channel. Ar<jats:sup>+2</jats:sup>, O<jats:sub>2</jats:sub><jats:sup>+</jats:sup>, and ArH<jats:sup>+</jats:sup> react with N-containing species in the plasma and/or during the ion extraction process. Ar<jats:sup>+</jats:sup> remains abundant even if there is no Ar in the outer gas, which indicates the probable occurrence of charge transfer reactions between N<jats:sub>2</jats:sub><jats:sup>+</jats:sup> and Ar. The present work corroborates two general concepts upon which several theories of the origin of suprathermal ionization in ICPs are based: (a) species are physically transported from the induction region to the axial channel; and (b) these species may react with and ionize neutral species in the axial channel. Ionization temperatures ( T<jats:sub>ion</jats:sub>) measured from the ratio Cd<jats:sup>+</jats:sup>/I<jats:sup>+</jats:sup> were 5750 to 6700 K for a N<jats:sub>2</jats:sub> outer flow ICP at a forward power of 1.2 kW. This T<jats:sub>ion</jats:sub> range is significantly below that obtained for an Ar outer gas ICP under otherwise similar operating parameters. </jats:p>
収録刊行物
-
- Applied Spectroscopy
-
Applied Spectroscopy 37 (5), 425-428, 1983-09
SAGE Publications