Determining the stress–strain behaviour of small devices by nanoindentation in combination with inverse methods
書誌事項
- 公開日
- 2003-06
- 権利情報
-
- https://www.elsevier.com/tdm/userlicense/1.0/
- DOI
-
- 10.1016/s0167-9317(03)00192-8
- 公開者
- Elsevier BV
この論文をさがす
収録刊行物
-
- Microelectronic Engineering
-
Microelectronic Engineering 67-68 818-825, 2003-06
Elsevier BV
