Pattern replication of 100nm to millimeter-scale features by thermal nanoimprint lithography
書誌事項
- 公開日
- 2006-04
- 権利情報
-
- https://www.elsevier.com/tdm/userlicense/1.0/
- DOI
-
- 10.1016/j.mee.2006.01.013
- 公開者
- Elsevier BV
この論文をさがす
収録刊行物
-
- Microelectronic Engineering
-
Microelectronic Engineering 83 (4-9), 902-905, 2006-04
Elsevier BV