Temperature distributions of radio-frequency plasma in water by spectroscopic analysis

Shinobu Mukasa, Shinfuku Nomura, Hiromichi Toyota, Tsunehiro Maehara, Fumiaki Abe, Ayato Kawashima

doi:10.1063/1.3264671

Temperature distributions of radio-frequency plasma in water by spectroscopic analysis

Shinobu Mukasa

Ehime University 1 Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
Shinfuku Nomura

Ehime University 1 Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
Hiromichi Toyota

Ehime University 1 Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
Tsunehiro Maehara

Ehime University 1 Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
Fumiaki Abe

Ehime University 1 Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
Ayato Kawashima

Ehime University 2 Faculty of Agriculture, , Matsuyama 790-8566, Japan

説明

<jats:p>Distributions of emission intensity from radicals, electron temperature, and rotational temperature at a radio frequency of 27.12 MHz plasma in water are clarified by detailed spectroscopy measurement. Through this investigation, the following were observed. The points of maximum emission intensity of Hα, Hβ, O (777 nm), and O (845 nm) are almost the same, while that of OH shifts upward. The electron temperature decreases, while the rotational temperature increases with pressure. The distribution of the electron temperature changes at a threshold pressure, which is concerned with a change in the electron discharge mechanism. The self-bias of the electrode changes from a negative to positive at a threshold pressure. The point of the maximum rotational temperature of OH radicals shifts to approximately 1 mm above that for the maximum intensity of OH emission.</jats:p>