Proton irradiation effects on AlN/GaN high electron mobility transistors

  • C. F. Lo
    University of Florida Department of Chemical Engineering, , Gainesville, Florida 32611
  • C. Y. Chang
    University of Florida Department of Chemical Engineering, , Gainesville, Florida 32611
  • B. H. Chu
    University of Florida Department of Chemical Engineering, , Gainesville, Florida 32611
  • H.-Y. Kim
    Korea University Department of Chemical and Biological Engineering, , Seoul 136-701, Korea
  • J. Kim
    Korea University Department of Chemical and Biological Engineering, , Seoul 136-701, Korea
  • David A. Cullen
    Arizona State University Department of Physics, , Tempe, Arizona 85287
  • Lin Zhou
    Arizona State University Department of Physics, , Tempe, Arizona 85287
  • David. J. Smith
    Arizona State University Department of Physics, , Tempe, Arizona 85287
  • S. J. Pearton
    University of Florida Department of Materials Science and Engineering, , Gainesville, Florida 32611
  • Amir Dabiran
    SVT Associates , Eden Prairie, Minnesota 55344
  • B. Cui
    SVT Associates , Eden Prairie, Minnesota 55344
  • P. P. Chow
    SVT Associates , Eden Prairie, Minnesota 55344
  • S. Jang
    Dankook University Department of Chemical Engineering, , Yongin 448-701, Korea
  • F. Ren
    University of Florida Department of Chemical Engineering, , Gainesville, Florida 32611

書誌事項

公開日
2010-08-31
DOI
  • 10.1116/1.3482335
公開者
American Vacuum Society

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説明

<jats:p>AlN/GaN high electron mobility transistors (HEMTs) were irradiated with 5 MeV protons at fluences from 2×1011 to 2×1015 protons/cm2. Changes from 10% to 35% of the saturation drain current and the source-drain resistances were observed for the HEMTs exposed to the proton irradiations due to radiation-induced carrier scattering and carrier removal. Both forward and reverse bias gate currents were increased after proton irradiation and affected the drain current modulation in the positive gate bias voltage range. There was almost no gate-lag observed for the HEMT exposed to 2×1011 protons/cm2 irradiation and minimal changes for the higher doses, which implied that few surface traps were created by the high energy proton irradiation.</jats:p>

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