From Piranha to Barracuda: Mechanism of Ozone and Water Vapor Photoresist Strip in a Wet Bench
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- T. Riedel
- Steag Microtech GmbH
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- K. Wolke
- Steag Microtech GmbH
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- Stefan De Gendt
- IMEC
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- Bart Onsia
- IMEC VZW
収録刊行物
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- Solid State Phenomena
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Solid State Phenomena 76-77 227-230, 2001-01
Trans Tech Publications, Ltd.
