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MOCVD of zirconium oxide thin films: Synthesis and characterization

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CiNii Books

Journal

Applied Surface Science

Applied Surface Science 255 (9), 4792-4795, 2009-02

Elsevier BV

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CRID

1363670320346446336
DOI

10.1016/j.apsusc.2008.11.059
ISSN

01694332
Web Site

https://api.elsevier.com/content/article/PII:S0169433208024227?httpAccept=text/xml

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