Big data analytics for forecasting cycle time in semiconductor wafer fabrication system
-
- Junliang Wang
- School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China
-
- Jie Zhang
- School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China
書誌事項
- 公開日
- 2016-04-22
- DOI
-
- 10.1080/00207543.2016.1174789
- 公開者
- Informa UK Limited
この論文をさがす
収録刊行物
-
- International Journal of Production Research
-
International Journal of Production Research 54 (23), 7231-7244, 2016-04-22
Informa UK Limited
