Capacitance-voltage characterization of GaAs–Al2O3 interfaces

  • G. Brammertz
    Interuniversity Microelectronics Center (IMEC vzw) , Kapeldreef 75, B-3001 Leuven, Belgium
  • H.-C. Lin
    Interuniversity Microelectronics Center (IMEC vzw) , Kapeldreef 75, B-3001 Leuven, Belgium
  • K. Martens
    Interuniversity Microelectronics Center (IMEC vzw) , Kapeldreef 75, B-3001 Leuven, Belgium
  • D. Mercier
    Interuniversity Microelectronics Center (IMEC vzw) , Kapeldreef 75, B-3001 Leuven, Belgium
  • S. Sioncke
    Interuniversity Microelectronics Center (IMEC vzw) , Kapeldreef 75, B-3001 Leuven, Belgium
  • A. Delabie
    Interuniversity Microelectronics Center (IMEC vzw) , Kapeldreef 75, B-3001 Leuven, Belgium
  • W. E. Wang
    Interuniversity Microelectronics Center (IMEC vzw) , Kapeldreef 75, B-3001 Leuven, Belgium
  • M. Caymax
    Interuniversity Microelectronics Center (IMEC vzw) , Kapeldreef 75, B-3001 Leuven, Belgium
  • M. Meuris
    Interuniversity Microelectronics Center (IMEC vzw) , Kapeldreef 75, B-3001 Leuven, Belgium
  • M. Heyns
    Interuniversity Microelectronics Center (IMEC vzw) , Kapeldreef 75, B-3001 Leuven, Belgium

書誌事項

公開日
2008-11-03
DOI
  • 10.1063/1.3005172
公開者
AIP Publishing

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説明

<jats:p>The authors apply the conductance method at 25 and 150°C to GaAs–Al2O3 metal-oxide-semiconductor devices in order to derive the interface state distribution (Dit) as a function of energy in the bandgap. The Dit is governed by two large interface state peaks at midgap energies, in agreement with the unified defect model. S-passivation and forming gas annealing reduce the Dit in large parts of the bandgap, mainly close to the valence band, reducing noticeably the room temperature frequency dispersion. However the midgap interface state peaks are not affected by these treatments, such that Fermi level pinning at midgap energies remains.</jats:p>

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