CMOS-on-LTCC integrated fingertip sensor with 3-axis tactile and thermal sensation for robots

収録刊行物

• 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

  2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) 2017-06

  IEEE