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COCOS (corona oxide characterization of semiconductor) non-contact metrology for gate dielectrics
Journal
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- AIP Conference Proceedings
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AIP Conference Proceedings 550 220-225, 2001
AIP
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Details 詳細情報について
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- CRID
- 1363951793806041344
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- ISSN
- 0094243X
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- Data Source
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- Crossref
