Impact of total ionizing dose irradiation on Pt/SrBi2Ta2O9/HfTaO/Si memory capacitors
-
- S. A. Yan
- Xiangtan University 1 School of Materials Science and Engineering, , Xiangtan 411105, China
-
- W. Zhao
- Northwest Institute of Nuclear Technology 4 , Xi'an, Shanxi 710024, China
-
- H. X. Guo
- Northwest Institute of Nuclear Technology 4 , Xi'an, Shanxi 710024, China
-
- Y. Xiong
- Xiangtan University 5 The School of Mathematics and Computational Science, , Xiangtan, Hunan 411105, China
-
- M. H. Tang
- Xiangtan University 1 School of Materials Science and Engineering, , Xiangtan 411105, China
-
- Z. Li
- Xiangtan University 1 School of Materials Science and Engineering, , Xiangtan 411105, China
-
- Y. G. Xiao
- Xiangtan University 1 School of Materials Science and Engineering, , Xiangtan 411105, China
-
- W. L. Zhang
- Xiangtan University 1 School of Materials Science and Engineering, , Xiangtan 411105, China
-
- H. Ding
- Xiangtan University 1 School of Materials Science and Engineering, , Xiangtan 411105, China
-
- J. W. Chen
- Xiangtan University 1 School of Materials Science and Engineering, , Xiangtan 411105, China
-
- Y. C. Zhou
- Xiangtan University 1 School of Materials Science and Engineering, , Xiangtan 411105, China
書誌事項
- 公開日
- 2015-01-05
- DOI
-
- 10.1063/1.4905354
- 公開者
- AIP Publishing
この論文をさがす
説明
<jats:p>In this work, metal-ferroelectric-insulator-semiconductor (MFIS) structure capacitors with SrBi2Ta2O9 (300 nm) as ferroelectric thin film and HfTaO (6 nm, 8 nm, 10 nm, and 12 nm) as insulating buffer layer were proposed and investigated. The prepared capacitors were fabricated and characterized before radiation and then subjected to 60Co gamma irradiation in steps of two dose levels. Significant irradiation-induced degradation of the electrical characteristics was observed. The radiation experimental results indicated that stability and reliability of as-fabricated MFIS capacitors for nonvolatile memory applications could become uncontrollable under strong irradiation dose and/or long irradiation time.</jats:p>
収録刊行物
-
- Applied Physics Letters
-
Applied Physics Letters 106 (1), 2015-01-05
AIP Publishing