Investigation of photoreaction mechanism of photosensitive glass by femtosecond laser

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  • Tomohiro Hongo
    The Institute of Physical and Chemical Research (RIKEN) , 2-1 Hirosawa, Wako, Saitama 351-0198, Japan and Department of Electrical Engineering, Graduate School of Engineering, , 2-2 Nishikicho, Kanda, Chiyoda-ku, Tokyo 101-8457
  • Koji Sugioka
    The Institute of Physical and Chemical Research (RIKEN) , 2-1 Hirosawa, Wako, Saitama 351-0198, Japan and Department of Electrical Engineering, Graduate School of Engineering, , 2-2 Nishikicho, Kanda, Chiyoda-ku, Tokyo 101-8457
  • Hiroyuki Niino
    National Institute of Advanced Industrial Science and Technology (AIST) , 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan
  • Ya Cheng
    The Institute of Physical and Chemical Research (RIKEN) , 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
  • Masashi Masuda
    The Institute of Physical and Chemical Research (RIKEN) , 2-1 Hirosawa, Wako, Saitama 351-0198, Japan and Department of Applied Electronics, Faculty of Industrial Science and Technology, , Yamazaki 2641, Noda, Chiba 278-8510, Japan
  • Iwao Miyamoto
    National Institute of Advanced Industrial Science and Technology (AIST) , 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan
  • Hiroshi Takai
    Tokyo Denki University Department of Electrical Engineering, Graduate School of Engineering, , 2-2 Nishikicho, Kanda, Chiyoda-ku, Tokyo 101-8457
  • Katsumi Midorikawa
    The Institute of Physical and Chemical Research (RIKEN) , 2-1 Hirosawa, Wako, Saitama 351-0198, Japan

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<jats:p>A high-intensity femtosecond (fs) laser can fabricate complicated three-dimensional microstructures inside photosensitive glass with high spatial resolution. In this work, the mechanism of the photoreaction of the photosensitive glass to the infrared fs laser is investigated. We examine the photoinduced electron excitation process on the basis of the determination of the critical dose and a change of the optical-absorption spectrum after the fs laser irradiation. The photoreaction mechanism is discussed in comparison with the case of an ultraviolet nanosecond laser irradiation. Finally, the successive interband electron excitation through defect levels by multiphoton absorption is proposed.</jats:p>

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