Nanoscaled interdigitated electrode arrays for biochemical sensors

書誌事項

公開日
1998-06
権利情報
  • https://www.elsevier.com/tdm/userlicense/1.0/
DOI
  • 10.1016/s0925-4005(98)00128-2
公開者
Elsevier BV

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説明

Abstract Nanoscaled interdigitated electrode arrays were made with deep UV lithography. Electrode widths and spacings from 500 down to 250 nm were achieved on large active areas (0.5×1 mm). These electrodes allow for the detection of affinity binding of biomolecular structures (e.g. antigens, DNA) by impedimetric measurements. Such a sensor with Pd electrodes on SiO 2 is developed and theoretically analysed. It was experimentally characterised in KCl solutions demonstrating its bulk-insensitive behaviour and the immobilisation of glucose oxidase (GOD) could be monitored by measuring the double layer impedance.

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