Properties of nanoporous silica thin films determined by high-resolution x-ray reflectivity and small-angle neutron scattering
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- Wen-li Wu
- Polymers Division, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541
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- William E. Wallace
- Polymers Division, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541
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- Eric K. Lin
- Polymers Division, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541
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- Gary W. Lynn
- Polymers Division, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541
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- Charles J. Glinka
- Center for Neutron Research, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, Maryland 20899-8562
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- E. Todd Ryan
- SEMATECH, 2706 Montopolis Drive, Austin, Texas 78741-6499
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- Huei-Min Ho
- SEMATECH, 2706 Montopolis Drive, Austin, Texas 78741-6499
説明
<jats:p>A new methodology based on a novel combination of a high-resolution specular x-ray reflectivity and small-angle neutron scattering has been developed to evaluate the structural properties of low-dielectric-constant porous silica thin films about one micrometer thick supported on silicon wafer substrates. To complement these results, film composition was determined by high-energy ion scattering techniques. For the example thin film presented here, the overall film density was found to be (0.55±0.01) g/cm3 with a pore wall density of (1.16±0.05) g/cm3 and a porosity of (53±1)%. The characteristic average dimension for the pores was found to be (65±1) Å. It was determined that (22.1±0.5)% of the pores had connective paths to the free surface. The mass fraction of water absorption was (3.0±0.5)% and the coefficient of thermal expansion was (60±20)×10−6/°C from room temperature to 175 °C. Lastly, model fitting of the specular x-ray reflectivity data indicated the presence of a thin surface layer with an increased electron density compared to the bulk of the film as well as an interfacial layer with a reduced electron density.</jats:p>
収録刊行物
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- Journal of Applied Physics
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Journal of Applied Physics 87 (3), 1193-1200, 2000-02-01
AIP Publishing
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詳細情報 詳細情報について
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- CRID
- 1363951796293187200
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- DOI
- 10.1063/1.371997
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- ISSN
- 10897550
- 00218979
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- データソース種別
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- Crossref