Effects of high-/spl kappa/ gate dielectric materials on metal and silicon gate workfunctions
書誌事項
- 公開日
- 2002-06
- 権利情報
-
- https://ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html
- DOI
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- 10.1109/led.2002.1004229
- 公開者
- Institute of Electrical and Electronics Engineers (IEEE)
この論文をさがす
収録刊行物
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- IEEE Electron Device Letters
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IEEE Electron Device Letters 23 (6), 342-344, 2002-06
Institute of Electrical and Electronics Engineers (IEEE)