グリム型イオン源を用いる高周波グロー放電質量分析法におけるアパーチャーバイアス電圧の影響

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タイトル別名
  • Effect of the aperture bias voltage in radio-frequency glow-discharge mass spectrometry with a Grimm-type ion source.
  • グリムガタ イオンゲン オ モチイル コウシュウハ グロー ホウデン シツリョ

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抄録

In radio-frequency (rf) glow-discharge mass spectrometry with a Grimm-type ion source, a positive bias voltage was applied only to the aperture of the ion source, while the anode was grounded. The ion signals measured in this way were greater than those obtained when the bias voltage was applied to both the anode and the aperture. The signal-to-background ratio for a ZrO2 sample became maximum at an aperture voltage of 55 V; it was ca. 20-times higher than that at 0 V. The maximum signal intensity was always obtained at this voltage, independently of the rf power and sample thickness. The interference of rf noise with a signal measurement could be completely suppressed by grounding the anode in this arrangement.

収録刊行物

  • 分析化学

    分析化学 46 (5), 351-355, 1997

    公益社団法人 日本分析化学会

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