Diamond film characterization by analyzing C 1s peak shapes with X-ray photo-electron spectroscopy.

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  • Ｘ線光電子分光法におけるＣ１ｓスペクトル波形解析によるダイヤモンド薄膜の評価
  • Xセン コウデンシ ブンコウホウ ニ オケル C1s スペクトル ハケイ カイ

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Abstract

Characterization of diamond films by XPS was carried out by measuring the FWHM (full width at half maximum) and the peak shape of a core C 1s spectrum, and this method was also applied to other carbon films. C 1s peak shapes of natural diamond, graphite carbon, amorphous carbon, glassy carbon, polyethylene (PE) and diamond films formed by the CVD method were analyzed. The C 1s peaks of natural diamond and diamond films showed the same FWHM value, i.e., the diamond films had diamond structure. While the C 1s peak of the natural diamond was symmetric, and those of the other carbon samples were asymmetric. The C 1s peak shape of diamond films was similar to that of amorphous-carbon containing C-H bonds. As a result, it was found that the diamond films contain the C-H bonds in their structure.

Journal

  • BUNSEKI KAGAKU

    BUNSEKI KAGAKU 42 (3), 133-140, 1993

    The Japan Society for Analytical Chemistry

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