Dust counting in clean liquids using small amounts of samples.

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  • NOZAWA Akiyoshi
    Analysis Center, Research Center, Mitsubishi Chemical Industries, Ltd.
  • IMURA Minako
    Analysis Center, Research Center, Mitsubishi Chemical Industries, Ltd.
  • OTAKA Yoshihisa
    Analysis Center, Research Center, Mitsubishi Chemical Industries, Ltd.

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Other Title
  • 少量試料を用いた清浄な液体中微粒子数の測定
  • ショウリョウ シリョウ オ モチイタ セイジョウ ナ エキタイチュウ ビリュウ

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Abstract

The method consists of clean filtration with cleaned nuclepore filter of 20 ml of sample solution, for example, photoresist, gelatin solution for color filter, diluted with cleaned solvent, and counting of stained particles on the filter using an optical microscope in the transmission mode. Viscous samples were diluted with solvent as small amount as possible to the viscosity low eough nfor the following filtration. The gelatin solution had to be hot filtered. As the number of particles found on the filter is extremely small, it is important to clean the filter perfectly before the filtration. It was possible only in the case of polyester nuclepore filter. Differential interference mode and dark field reflection mode observations are not good because the topography of the filter surface is too much emphasized. Particles of ≥0.2 μm can be counted using × 1000 magnitude and the immersion oil. Computer image analysis had a good correlation mith the direct observation by the operator. 2002000 particles per ml were detected in the above mentioned samples, the contribution of the blank being about 20%. All the operations except the microscope observation were carried out carefully in a clean room of class 100.

Journal

  • BUNSEKI KAGAKU

    BUNSEKI KAGAKU 34 (11), T148-T151, 1985

    The Japan Society for Analytical Chemistry

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