New techniques for controlling the excitation source in glow discharge optical emission spectrometry
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- WAGATSUMA Kazuaki
- Institute for Materials Research, Tohoku University
Bibliographic Information
- Other Title
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- 発光分光分析用グロー放電プラズマ励起源の新しい制御法
- ハッコウ ブンコウ ブンセキ ヨウ グロー ホウデン プラズマレイキゲン ノ アタラシイ セイギョホウ
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Abstract
This paper describes three advanced detection techniques in glow discharge optical emission spectrometry: (a) an applied voltage modulation method for a d.c.-powered glow discharge emission source, (b) a bias-current introduction method and (c) an amplitude modulation method for an r.f.-powered glow discharge emission source. In the applied voltage modulation method, an alternating component superimposed on a d.c. bias voltage is applied to the excitation source. Only the emission component corresponding to the alternating frequency can be selectively detected at very low noise levels with a lock-in amplifier, thus contributing to an improvement in the signal-to-noise ratio. In the bias-current introduction method, a d.c. current driven by the self-bias voltage is conducted through the plasma body by connecting a low-pass filter circuit and a load resistor with the glow discharge lamp. The electrons introduced into the plasma can cause various excitation processes more actively and, as a result, the emission intensities increase, which yields a better detection limit in the quantitative analysis. In the amplitude modulation of an r.f. voltage, the emission detection with a lock-in amplifier enables the measurement to be performed with a better signal-to-noise ratio, whereas the sputtering rate and the sampling amount are reduced. This method can be successfully applied to determine depth elemental composition of nm-order thin films.<br>
Journal
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- BUNSEKI KAGAKU
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BUNSEKI KAGAKU 52 (6), 393-403, 2003
The Japan Society for Analytical Chemistry
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Keywords
Details 詳細情報について
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- CRID
- 1390001204052690304
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- NII Article ID
- 110002905234
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- NII Book ID
- AN00222633
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- COI
- 1:CAS:528:DC%2BD3sXkslGlsbc%3D
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- NDL BIB ID
- 6616750
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- ISSN
- 05251931
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- NDL-Digital
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed