Consideration on matrix effect on modified relative sensitivity factors for Auger electron spectroscopy.

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  • オージェ電子分光法における頻用相対感度係数のマトリックス効果とその補正の検討
  • オージェ デンシ ブンコウホウ ニ オケル ヒンヨウ ソウタイ カンド ケイス
  • オージェ電子分光法における頻用相対感度係数のマトリックス効果とその補正の検討(<特集>無機材料分析のためのスペクトロメトリー)

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Abstract

Relative sensitivity factors have been utilized for semi-quantitative analysis by Auger electron spectroscopy. In order to perform more accurate measuring the commonly used relative sensitivity factors read out from a Handbook were modified reflecting the dependence of the Auger signal on atomic density using the equations, λ∝√A/ρ, λ∝/A/ρ andλ∝A/(ρZ ), where λ is inelastic mean free path of electron, A is the atomic weight, Z is the atomic number and ρ is the density. Then the modified relative sensitivity factors could be approached to those experimentally obtained with binary systems such as Fe-M, Si-M and C-M, where M is 3d transition metals.

Journal

  • BUNSEKI KAGAKU

    BUNSEKI KAGAKU 35 (8), 766-769, 1986

    The Japan Society for Analytical Chemistry

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