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Crystal Structure Characterization of Metal Interconnects in ULSIs Using EBSP/OIM Technique
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- Hirose Yukinori
- Renesas Technology Corp.
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- Morimoto Noboru
- Renesas Technology Corp.
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- Takada Yuji
- Renesas Technology Corp.
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- Fukumoto Koji
- Renesas Technology Corp.
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- Mashiko Yoji
- Renesas Technology Corp.
Bibliographic Information
- Other Title
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- ＥＢＳＰ／ＯＩＭ法を用いたＵＬＳＩ配線の結晶解析技術
- EBSP OIMホウ オ モチイタ ULSI ハイセン ノ ケッショウ カイセキ ギジュツ
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Journal
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- Materia Japan
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Materia Japan 43 (1), 43-48, 2004
The Japan Institute of Metals and Materials
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Keywords
Details 詳細情報について
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- CRID
- 1390001204055506688
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- NII Article ID
- 10011981252
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- NII Book ID
- AN10433227
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- ISSN
- 18845843
- 13402625
- http://id.crossref.org/issn/13402625
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- NDL BIB ID
- 6925306
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL Search
- Crossref
- CiNii Articles