Transparent Conducting Al-Zn-O Thin Films Prepared by Pulsed Laser Deposition in Magnetic Field Perpendicular to the Plume

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  • AGURA Hideaki
    Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
  • SUZUKI Akio
    Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
  • AOKI Takanori
    Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
  • MATSUSHITA Tatsuhiko
    Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
  • OKINAKA Hirokazu
    Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
  • HOKI Shigeyasu
    Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
  • OKUDA Masahiro
    Department of Physics and Electronics, College of Engineering, Osaka Prefecture University

Bibliographic Information

Other Title
  • パルスレーザー堆積法でプルームに磁場を印加して作製したＡｌ－Ｚｎ－Ｏ系透明導電膜
  • ソクホウ パルスレーザー タイセキホウ デ プルーム ニ ジバ オ インカ シテ サクセイ シタ Al Zn Oケイ トウメイ ドウデン マク

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Abstract

ZnO doped with 2 wt% and 1 wt% Al2O3 (AZO) films were deposited on glass substrates by pulsed laser deposition method. In all experiments, repetition rates of 10 Hz, the energy density of 0.752 J/cm2, and an ablation time of 1550 min irrespective of magnetic field. A lowest resistivity of 9.27×10-5 Ω·cm and an optical transmittance of more than 91% in the visible range of the spectrum were obtained on the film fabricated with the magnetic field. This improvement of the properties with using magnetic field is due to the enhancement of crystallization and crystal grain growth and the improvement of ZnO (0002) orientation.

Journal

  • Shinku

    Shinku 46 (10), 752-755, 2003

    The Vacuum Society of Japan

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