Outgassing Characteristics of an Unbaked Vacuum System by Pressure Rise Method.
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- AKAISHI Kenya
- National Institute for Fusion Science
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- EZAKI Kazuhiro
- National Institute for Fusion Science
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- KUBOTA Yusuke
- National Institute for Fusion Science
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- MOTOJIMA Osamu
- National Institute for Fusion Science
Bibliographic Information
- Other Title
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- 非ベーク真空系の圧力ビルドアップ特性
- ヒベーク シンクウケイ ノ アツリョク ビルドアップ トクセイ
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Abstract
The outgassing rates of an unbaked vacuum chamber were measured by the orifice pumping and the pressre rise methods. It was found that the measured outgassing rates were dependent on pumping speed. The change of residual gas composition in the test chamber during measurement of outgassing rate was observed by a quadrupole mass analyzer. Before cut-off pumping, water vapor was a predominant desorbing gas, but after cut off pumping, hydrogen became a predominant desorbing gas instead of water.
Journal
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- Shinku
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Shinku 42 (3), 204-207, 1999
The Vacuum Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390001204063709312
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- NII Article ID
- 10002476277
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- NII Book ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL BIB ID
- 4714524
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed