Influence of the Electrons and the Ions Generated Outside of the Gauge on the Total Pressure Measurement by the Axial-symmetric Transmission Gauge
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- TAKAHASHI Naoki
- ULVAC Inc.
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- YUYAMA Junpei
- ULVAC Inc.
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- TUZI Yutaka
- ULVAC Corporation
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- ARAKAWA Ichiro
- Department of Physics, Gakushuin Univ.
Bibliographic Information
- Other Title
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- 軸対称透過形電離真空計における外部入射電子・イオンによる影響の除去特性
- ジク タイショウ トウカガタ デンリ シンクウケイ ニ オケル ガイブ ニュウシャ デンシ イオン ニ ヨル エイキョウ ノ ジョキョ トクセイ
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Abstract
The effect of disturbances induced by the injection of the electrons and ions from outside of the gauge on the axial-symmetric transmission gauge (AT gauge) was examined. There were less sign of disturbance in comparison to a BA gauge and an extractor gauge. The energy analyzer in the AT gauge works as a cut off filter for the charged particles and reduces the disturbances from the external source as well as the effects of the soft x-rays and ESD (electron stimulated desorption) ion generated in the ionizer.
Journal
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- Shinku
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Shinku 46 (8), 619-623, 2003
The Vacuum Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390001204063882368
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- NII Article ID
- 10011611332
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- NII Book ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL BIB ID
- 6671547
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed