Influence of the Electrons and the Ions Generated Outside of the Gauge on the Total Pressure Measurement by the Axial-symmetric Transmission Gauge

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  • 軸対称透過形電離真空計における外部入射電子・イオンによる影響の除去特性
  • ジク タイショウ トウカガタ デンリ シンクウケイ ニ オケル ガイブ ニュウシャ デンシ イオン ニ ヨル エイキョウ ノ ジョキョ トクセイ

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Abstract

The effect of disturbances induced by the injection of the electrons and ions from outside of the gauge on the axial-symmetric transmission gauge (AT gauge) was examined. There were less sign of disturbance in comparison to a BA gauge and an extractor gauge. The energy analyzer in the AT gauge works as a cut off filter for the charged particles and reduces the disturbances from the external source as well as the effects of the soft x-rays and ESD (electron stimulated desorption) ion generated in the ionizer.

Journal

  • Shinku

    Shinku 46 (8), 619-623, 2003

    The Vacuum Society of Japan

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