Microparticle behavior in a low pressure vacuum chamber.
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- MORITA Yoshimitsu
- USHIO, Particle Monitor Group
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- YAMAGUCHI Masanori
- USHIO, Particle Monitor Group
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- KAMIYA Seisaku
- USHIO, Particle Monitor Group
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- NAKATA Shigenori
- USHIO, Particle Monitor Group
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- UEKI Kazuyoshi
- USHIO, Particle Monitor Group
Bibliographic Information
- Other Title
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- 低圧容器内での微粒子挙動
- テイアツ ヨウキナイ デ ノ ビリュウシ キョドウ
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Abstract
記事分類: 測定・測定器
Journal
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- Shinku
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Shinku 34 (3), 279-282, 1991
The Vacuum Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390001204064025088
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- NII Article ID
- 130000868995
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- NII Book ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL BIB ID
- 3716757
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles