Numerical Analysis of the Rarefied Flow in a Vacuum Pump Driven by Thermal Edge Flow

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  • SUGIMOTO Hiroshi
    Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University

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Other Title
  • 熱尖端流によって駆動される真空ポンプ内の希薄気流の数値解析
  • ネツ センタンリュウ ニ ヨッテ クドウ サレル シンクウ ポンプ ナイ ノ キハク キリュウ ノ スウチ カイセキ

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Abstract

  Steady gas flows in a vacuum pump driven by thermal edge flow, which is proposed in Rarefied Gas Dynamics, AIP, New York, 138-141 (2002), are investigated numerically for various Knudsen numbers by the direct simulation Monte Carlo (DSMC) method based on the Boltzmann equation for a hard-sphere gas. The data of the maximum mass flow rate, energy consumption rate, and the maximum compression ratio of the pump is presented with some additional results on the effect of geometry and temperature ratio in the pump unit.<br>

Journal

  • Shinku

    Shinku 49 (8), 481-487, 2006

    The Vacuum Society of Japan

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