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- 尾高 憲二
- 独立行政法人産業技術総合研究所 計測フロンテイア研究部門
書誌事項
- タイトル別名
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- Turbomolecular Pump
- ターボ ブンシ ポンプ
この論文をさがす
抄録
Turbomolecular pumps (TMPs) are fully grown products. There are four points to say so. First, hydrodynamic designing method is well established because there is no change in the pumping speed in the last ten years. Second, ultimate pressures of the order of 10−10 Pa are achieved. This corresponds to the lowest outgassing rate developed for metals. Third, they have extended operating range to pressures as high as 100 Pa with combination of turbo-drag pumps. Fourth, TMPs with electro-magnetic bearings produce perfectly clean vacuum with clean roughing pumps. For further development TMPs might focus on special usages.<br>
収録刊行物
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- 真空
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真空 49 (8), 466-469, 2006
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390001204064219008
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- NII論文ID
- 10018052093
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- NII書誌ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL書誌ID
- 8091199
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可
