On the Field Emission Microscope with a Base Pressure of 10<SUP>-10</SUP> Pa

Bibliographic Information

Other Title
  • 10`-10´Paの到達真空度をもつ強電界電子放射測定装置の試作
  • 10 10Pa ノ トウタツ シンクウド オ モツ キョウデンカイ デンシ ホ

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Description

The field emission microscope with a low base pressure has been constructed for studying the stability of the emission Using a diffusion pump with a liquid nitrogen trap (2001/s) combined with a sublimation pump (8001/s), the system has been routinely evacuated to 10-10 Pa.

Journal

  • Shinku

    Shinku 26 (9), 726-730, 1983

    The Vacuum Society of Japan

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