イオンプレーティングのための大電流，長寿命陰極の研究

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タイトル別名
  • Research of High Current and Long Life Cathode for Ion Plating
  • イオン プレーテング ノ タメ ノ ダイ デンリュウ チョウジュミョウ インキ

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It is pointed out that a lanthanium hexaboride LaB6 cathode is the most useful to produce a discharge plasma source for ion plating, which can be operated continuously at high current density (≥40 A/cm2) with long life times and can be exposed to air after use without deterioration. Next, how to use the LaB6 conveniently is discussed with various experimental processes. Then, it is required that the LaB6 cathode must be simple and strong mechanically, can start a gas discharge easily and can use stably in a magnetic field.<BR>After we tried to remove a W filament which heats the LaB6 initially and to improve demerits of the ordinary cylindrical type LaB6 cathode, we developed a disc LaB6 cathode with an assistant Ta pipe cathode which concentrates a pre-discharge (<10 A) into the cathode aperture and heats up the disc LaB6 indirectly to prepare for starting a higher current (10A300 A) discharge. This LaB6 cathode is very hopeful as an almighty cathode for ion plating.<BR>It should be also emphasized that an effective power supply is developed for this disc LaB6 cathode.

収録刊行物

  • 真空

    真空 25 (10), 660-670, 1982

    一般社団法人 日本真空学会

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