書誌事項
- タイトル別名
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- Thermal Stability of the Interface of Fe/Fe-O Artificial Superlattices.
- パルス ハンノウセイ スパッタリング ニヨル Fe Fe-O ジンコウ コウシ
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説明
Pulse reactive sputtering (PRS) using a metal target and reactive gas as O2 or N2 is one of the fast deposition method to prepare multilayered films composed of metallic layers and metallic compound layers which contain the elements of the reactive gases. We have investigated the formation of the layered structures of Fe/Fe-O films by using optical emission spectra from plasma in the sputtering process. We successfully prepared Fe/Fe-O multilayers with precise periodicity of nanometer level with the low activated oxygen plasma condition. Thermal stability of the layered structure and the soft magnetic properties of Fe/Fe-O films were studied by XRD and the measurements of permeability after thermal treatments at several temperatures. It was observed that the periodicity of the structure begun to destroy and the permeability was degraded at around 400°C. The layered structure of Fe/Fe-O films thought to be tougher than that of Fe/SiO2 films against the thermal treatment.
収録刊行物
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- 真空
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真空 41 (7), 616-621, 1998
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390001204065239168
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- NII論文ID
- 10001960456
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- NII書誌ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL書誌ID
- 4534922
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可