チタン系真空材料の表面キャラクタリゼーション

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書誌事項

タイトル別名
  • Characterization of the Surface Oxide Layer Formed on a Titanium Alloy Material for Ultrahigh Vacuum
  • チタンケイ シンクウ ザイリョウ ノ ヒョウメン キャラクタリゼーション

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説明

  The surface oxide layer of a titanium alloy treated by mechanochemical polishing (MCP) was characterized using a scanning electron microscope (SEM), transmission electron microscope (TEM), atomic force microscope (AFM), X-ray photoelectoron spectoroscopy (XPS), auger electoron spectoroscopy (AES) and secondary ion mass spectrometry (SIMS). The results showed that surface oxide layer was amorphous titanium oxide and had about 5 nm thickness. At the interface between surface oxide layer and substrate, there was a region of high hydrogen concentration. In the same region, the Ti-F chemical component was found. It seems that this interface layer acts as a barrier for the bulk hydrogen diffusion, and gives low hydrogen concentration at the surface layer resulting in the low outgassing property in the titanium materials.<br>

収録刊行物

  • 真空

    真空 50 (1), 53-56, 2007

    一般社団法人 日本真空学会

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